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Hazardous Gas Monitoring Throughout the Semiconductor

Hazardous Gas Monitoring Throughout the Semiconductor

Detect and AddressAutomation Aids AnalysisFab Project ProcessDesigning For SafetyBecause each of the hazardous gas (targets) is applied from within different "gas families" (e.g., hydrides, halogens, mineral acids, flammables, etc.), each has unique gas properties and safe exposure limits. As a result, each TGMS design must begin with a risk assessment (RA). A complete list of all hazardous gases (including inerts) and how they're employed (stored, delivered and handled) must be obtained to determine how best to safely detect a gas leak for each individual gas target. Due to the many different …See more on controlglobal.comPublished: Feb 28, 2018Hazardous Gas Monitoring: A Guide for Semiconductor and ... b-ok.cc/book/927434/0ebee8Monitoring hazardous gases is highly complex, yet critical to semiconductor manufacturing. This book includes excerpts from codes and standards relevant to the industry, including the latest editions of model fire codes. This guide provides the basics to successfully comply with code requirements.

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